Author:
Gu-Stoppel S.,Lisec T.,Fichtner S.,Funck N.,Claus M.,Wagner B.,Lofink F.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. A multi-chip directly mounted 512-MEMS-mirror array module with a hermetically sealed package for large optical cross-connects;Mi;J. Opt. Pure Appl. Opt.,2006
2. Preciseley Microtechnology Corp;MEMS Mirror Array,2020
3. Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads;Ataman;2011 IEEE 24th International Conference on Micro Electro Mechanical Systems,2011
4. A dual-axis high fill-factor micromirror array for high thermal loads;Ataman;16th International Conference on Optical MEMS and Nanophotonics,2011
5. Mirrorcle Technologies Announces Availability of 5.0Mm Diameter MEMS Mirrors,2020
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