Affiliation:
1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences (CAS), Shanghai, China
Funder
National Key Research and Development Program of China
Research and Development Program of Scientific Instruments and Equipment
Chinese Academy of Sciences
Shanghai Municipal Science and Technology Commission
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
General Engineering,General Materials Science,General Computer Science,Electrical and Electronic Engineering
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