Tilted beam SEM, 3D metrology for industry
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SPIE
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1. Modeling and algorithm of three-dimensional metrology with critical dimension scanning electron microscope;Journal of Vacuum Science & Technology B;2023-11-20
2. Training procedure for scanning electron microscope 3D surface reconstruction using unsupervised domain adaptation with simulated data;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-04-28
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