1. The International Technology Roadmap for Semiconductors (San Jose: Semiconductor Industry Association, 2016); available from the Internet: http://member.itrs.net.
2. Gaps Analysis for CD Metrology Beyond the 22 nm Node;Bunday,2013
3. CD-SEM metrology for sub-10 nm width features;Bunday,2014
4. HVM Metrology Challenges towards the 5 nm Node;Bunday,2016
5. Determining the shape and periodicity of nanostructures using small-angle X-ray scattering