1X deep-UV lithography with chemical amplification for 1-micron DRAM production
Author:
Maltabes John G.1,
Holmes Steven J.1,
Morrow James R.1,
Barr Roger L.1,
Hakey Mark C.1,
Reynolds Gregg1,
Brunsvold William R.1,
Willson C. Grant1,
Clecak Nicholas J.1,
MacDonald Scott A.1,
Ito Hiroshi1
Cited by
35 articles.
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