Exploiting sub-20-nm complementary metal-oxide semiconductor technology challenges to design affordable systems-on-chip-Reference-Cited by-同舟云学术

Exploiting sub-20-nm complementary metal-oxide semiconductor technology challenges to design affordable systems-on-chip

Published:2014-12-30 Issue:1 Volume:14 Page:011007
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Vaidyanathan Kaushik¹,Zhu Qiuling¹,Liebmann Lars²,Lai Kafai²,Wu Stephen²,Liu Renzhi¹,Liu Yandong²,Strojwas Andzrej¹,Pileggi Larry¹

Affiliation:

1. Carnegie Mellon University, Department of ECE, 5000 Forbes Avenue, Hamerschlag Hall 2114-D, Pittsburgh, Pennsylvania 15213, United States

2. IBM, 2070 Route 52, Hopewell Junction, New York 12533, United States

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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