Customization and design of directed self-assembly using hybrid prepatterns-Reference-Cited by-同舟云学术

Customization and design of directed self-assembly using hybrid prepatterns

Published:2015-03-19 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Alternative Lithographic Technologies VII
language:
Short-container-title:

Author:

Cheng Joy,Doerk Gregory S.,Rettner Charles T.,Singh Gurpreet,Tjio Melia,Truong Hoa,Arellano Noel,Balakrishnan Srinivasan,Brink Markus,Tsai Hsinyu,Liu Chi-Chun,Guillorn Michael,Sanders Daniel P.

Publisher

SPIE

Reference11 articles.

1. Advanced Materials

2. Block copolymers and conventional lithography

3. Block Copolymer Based Nanostructures: Materials, Processes, and Applications to Electronics

4. Directed self-assembly of block copolymers for next generation nanolithography

5. Rectangular Patterns Using Block Copolymer Directed Assembly for High Bit Aspect Ratio Patterned Media

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ionic liquid mediated one-step perpendicular assembly in block copolymer thin films for ultrafiltration membrane applications;Journal of Membrane Science;2024-09

2. 亚十纳米导向自组装与深紫外混合光刻技术;Laser & Optoelectronics Progress;2022

3. Resist-Free Directed Self-Assembly Chemo-Epitaxy Approach for Line/Space Patterning;Nanomaterials;2020-12-07

4. Overview and development of EDA tools for integration of DSA into patterning solutions;SPIE Proceedings;2017-03-21

5. Design technology co-optimization assessment for directed self-assembly-based lithography: design for directed self-assembly or directed self-assembly for design?;Journal of Micro/Nanolithography, MEMS, and MOEMS;2017-02-07