A new lithography hotspot detection framework based on AdaBoost classifier and simplified feature extraction

Author:

Matsunawa Tetsuaki,Gao Jhih-Rong,Yu Bei,Pan David Z.

Publisher

SPIE

Reference24 articles.

1. Design for Manufacturing With Emerging Nanolithography

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2. Lithography hotspot detection through multi-scale feature fusion utilizing feature pyramid network and dense block;Journal of Micro/Nanopatterning, Materials, and Metrology;2024-02-10

3. AI/ML algorithms and applications in VLSI design and technology;Integration;2023-11

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