Feature Fusion based Hotspot Detection with R-EfficientNet

Author:

Wang Chun1ORCID,Fang Yi1ORCID,Zhang Sihai2ORCID

Affiliation:

1. School of MicroElectronics, University of Science and Technology of China, Hefei, Anhui, P. R. China, China

2. School of MicroElectronics, University of Science and Technology of China, Hefei, Anhui, P. R. China, China and the Key Laboratory of Wireless-Optical Communications, Chinese Academy of Sciences, China

Funder

Huawei Technology Innovative Research

Publisher

ACM

Reference24 articles.

1. Ran Chen, Wei Zhong, Haoyu Yang, Hao Geng, Xuan Zeng, and Bei Yu. 2019. Faster Region-based Hotspot Detection. In 2019 56th ACM/IEEE Design Automation Conference (DAC). 1–6.

2. Semisupervised Hotspot Detection With Self-Paced Multitask Learning

3. High Performance Lithography Hotspot Detection With Successively Refined Pattern Identifications and Machine Learning

4. Jhih-Rong Gao, Bei Yu, and David Z Pan. 2014. Accurate lithography hotspot detection based on PCA-SVM classifier with hierarchical data clustering. In Design-Process-Technology Co-optimization for Manufacturability VIII, Vol. 9053. SPIE, 114–123.

5. Hotspot Detection via Attention-based Deep Layout Metric Learning

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