Geometrical positioning surveying-based features for BEOL line-end-pull-back modeling using regression-based machine-learning-Reference-Cited by-同舟云学术

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Geometrical positioning surveying-based features for BEOL line-end-pull-back modeling using regression-based machine-learning

Published:2023-06-29 Issue:02 Volume:22 Page:
ISSN:2708-8340
Container-title:Journal of Micro/Nanopatterning, Materials, and Metrology
language:
Short-container-title:J. Micro/Nanopattern. Mats. Metro.

Author:

Hamed Fathi Hamed Ahmed¹,Hegazy Hazem²,El-Sewefy Omar²,Dessouky Mohamed¹,Salem Ashraf³

Affiliation:

1. Ain Shams University, Electronics Engineering and Electrical Communications Department, Faculty of Engineering, Cairo, Egypt

2. Siemens EDA, Calibre Design-to-Silicon, Siemens Industry Software Inc., Cairo, Egypt

3. Ain Shams University, Computer and Systems Engineering Department, Faculty of Engineering, Cairo, Egypt

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Arts and Humanities

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