Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
25 articles.
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1. An Alternating Direction Method of Multipliers for Inverse Lithography Problem;Numerical Mathematics: Theory, Methods and Applications;2023-06
2. 先进计算光刻;Laser & Optoelectronics Progress;2022
3. 计算光刻研究及进展;Laser & Optoelectronics Progress;2022
4. Inverse lithography technology: 30 years from concept to practical, full-chip reality;Journal of Micro/Nanopatterning, Materials, and Metrology;2021-08-31
5. VLSI mask optimization: From shallow to deep learning;Integration;2021-03