1. Qualification of structured curvilinear ILT assist features for production;Journal of Micro/Nanopatterning, Materials, and Metrology;2024-03-14
2. A GPU-Enabled Level-Set Method for Mask Optimization;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-02
3. Computation of transmission cross coefficients for pixelated illumination source;DTCO and Computational Patterning;2022-05-26
4. 光源掩模联合优化技术研究;Laser & Optoelectronics Progress;2022
5. Comparison of sparse-based full chip source optimization with different bases;Twelfth International Conference on Information Optics and Photonics;2021-11-01