An Alternating Direction Method of Multipliers for Inverse Lithography Problem
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Published:2023-06
Issue:3
Volume:16
Page:820-846
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ISSN:1004-8979
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Container-title:Numerical Mathematics: Theory, Methods and Applications
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language:
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Short-container-title:NMTMA
Author:
null Junqing Chen,Liu Haibo
Publisher
Global Science Press
Subject
Applied Mathematics,Computational Mathematics,Control and Optimization,Modeling and Simulation