Rapid thermal annealing of Al‐Si contacts
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.95517
Reference5 articles.
1. SLT Device Metallurgy and its Monolithic Extension
2. Al‐Si contacts formed by ion irradiation and post‐annealing
3. Contact Resistance of Al/Si Ohmic Electrodes Formed by Rapid Lamp Sintering.
4. Elimination of hillocks on Al‐Si metallization by fast‐heat‐pulse alloying
5. Direct measurements of interfacial contact resistance, end contact resistance, and interfacial contact layer uniformity
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