ZrO2 film interfaces with Si and SiO2
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1994938
Reference24 articles.
1. Thermodynamic stability of binary oxides in contact with silicon
2. Interfacial silicon oxide formation during synthesis of ZrO2 on Si(100)
3. Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal–insulator–semiconductor structures and current transport mechanisms
4. Interfacial properties of ZrO2 on silicon
5. Thermal decomposition of ZrO2/SiO2 bilayer on Si(001) caused by void nucleation and its lateral growth
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. The effect of nanometre-scale kinetic competition on the phase selection in Zr/Si superstructure;Materials Characterization;2024-02
2. The interface of atomic layer deposited ZrO2 on Si/SiO2 from an alkoxide zirconium precursor and ethanol: A transmission electron microscopy‐focused study;Surface and Interface Analysis;2023-03-14
3. Analysis of Structural, Optical, and Aquaphobic Properties of Zirconium Oxide Nanofilms by Varying Sputtering Gas;Advances in Materials Science and Engineering;2022-01-30
4. Influence of film thickness on the dielectric characteristics of hafnium oxide layers;Thin Solid Films;2019-11
5. High energy (150 MeV) Fe11+ ion beam induced modifications of physico-chemical and photoluminescence properties of high-k dielectric nanocrystalline zirconium oxide thin films;Ceramics International;2019-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3