Diagnostics of high‐frequency discharges in CH4/H2by time‐ and space‐resolved optical emission spectroscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103320
Reference14 articles.
1. Ion dynamics of rf plasmas and plasma sheaths: A time‐resolved spectroscopic study
2. Effects of frequency on optical emission, electrical, ion, and etching characteristics of a radio frequency chlorine plasma
3. The Spatial and Temporal Evolution of the Glow in an RF Discharge
4. Time- and space-resolved spectroscopy of electron transport in low-frequency discharge plasma in argon
5. Temporal intensity modulation of spectral lines in a low‐frequency discharge in argon
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