Structure and Origin of Stacking Faults in Epitaxial Silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1702622
Reference13 articles.
1. Epitaxial Silicon Films by the Hydrogen Reduction of SiCl[sub 4]
2. Stacking Faults in Epitaxial Silicon
3. X‐Ray Observations of Partial Dislocations in Epitaxial Silicon Films
4. A kinematical theory of diffraction contrast of electron transmission microscope images of dislocations and other defects
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