Determining the relationship between local lattice strain and slip systems of dislocations around shallow trench isolation by convergent-beam electron diffraction
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1465517
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1. Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns;Journal of Electron Microscopy;2010-05-19
2. Shallow Trench Isolation Edge Effect on Random Telegraph Signal Noise and Implications for Flash Memory;IEEE Transactions on Electron Devices;2009-09
3. Shallow trench isolation liners and their role in reducing lattice strains;Applied Physics Letters;2008-10-06
4. Probing nanoscale local lattice strains in advanced Si complementary metal-oxide-semiconductor devices;Applied Physics Letters;2006-08-07
5. nlinImproving spatial resolution of convergent beam electron diffraction strain mapping in silicon microstructures;Applied Physics Letters;2005-02-07
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