nlinImproving spatial resolution of convergent beam electron diffraction strain mapping in silicon microstructures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1855408
Reference9 articles.
1. Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
2. Application of convergent beam electron diffraction to two-dimensional strain mapping in silicon devices
3. Local lattice strain measurements in semiconductor devices by using convergent-beam electron diffraction
4. Determining the relationship between local lattice strain and slip systems of dislocations around shallow trench isolation by convergent-beam electron diffraction
5. Higher order Laue zone effects in electron diffraction and their use in lattice parameter determination
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