Ion energy uniformity in high-frequency capacitive discharges
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1848183
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1. A PIC-MC simulation of the effect of frequency on the characteristics of VHF SiH4/H2discharges
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3. Systematic characterization of low-pressure capacitively coupled hydrogen discharges
4. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
5. Analytical model of a dual frequency capacitive sheath
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