Analytical relationship for the oxidation of silicon in dry oxygen in the thin‐film regime
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339305
Reference28 articles.
1. General Relationship for the Thermal Oxidation of Silicon
2. Thermal Oxidation of Silicon in Dry Oxygen Growth‐Rate Enhancement in the Thin Regime: I . Experimental Results
3. Thermal Oxidation of Silicon in Dry Oxygen: Growth‐Rate Enhancement in the Thin Regime: II . Physical Mechanisms
4. Design and operation of an automated, high-temperature ellipsometer
5. Design and Operation of ETA, an Automated Ellipsometer
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