Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices-Reference-Cited by-同舟云学术

Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices

Published:2022-10-12 Issue:10 Volume:5 Page:15847-15854
ISSN:2574-0970
Container-title:ACS Applied Nano Materials
language:en
Short-container-title:ACS Appl. Nano Mater.

Author:

Berenschot Erwin¹,Tiggelaar Roald M.²^ORCID,Borgelink Bjorn¹,van Kampen Chris¹,Deenen Cristian S.¹,Pordeli Yasser¹^ORCID,Witteveen Haye¹,Gardeniers Han J. G. E.¹^ORCID,Tas Niels R.¹^ORCID

Affiliation:

1. Mesoscale Chemical Systems, MESA+ Institute, University of Twente, Drienerlolaan 5, 7522 NB Enschede, The Netherlands

2. NanoLab Cleanroom, MESA+ Institute, University of Twente, Drienerlolaan 5, 7522 NB Enschede, The Netherlands

Funder

University of Twente

H2020 European Research Council

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsanm.2c04079

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