Design and Operation of ETA, an Automated Ellipsometer
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Published:1973-11
Issue:6
Volume:17
Page:472-489
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ISSN:0018-8646
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Container-title:IBM Journal of Research and Development
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language:
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Short-container-title:IBM J. Res. & Dev.
Author:
Hauge P. S.,Dill F. H.
Subject
General Computer Science
Cited by
166 articles.
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