High temperature and low pressure chemical vapor deposition of silicon nitride on AlGaN: Band offsets and passivation studies
Author:
Affiliation:
1. Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7919, USA
2. REU, Physics Department at Wofford College, Spartanburg, South Carolina 29303, USA
Funder
National Science Foundation (NSF)
Army Research Office (ARO)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/jap/119/14/1.4945775.pdf?itemId=/content/aip/journal/jap/119/14/10.1063/1.4945775&mimeType=pdf&containerItemId=content/aip/journal/jap
Reference42 articles.
1. Fabrication of vertical Schottky barrier diodes on n-type freestanding AlN substrates grown by hydride vapor phase epitaxy
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3. Theory of hole initiated impact ionization in bulk zincblende and wurtzite GaN
4. The Preparation and Properties of Aluminum Nitride Films
5. AlGaN Channel High Electron Mobility Transistors: Device Performance and Power-Switching Figure of Merit
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