Phase transformation of sputter deposited tungsten thin films with A‐15 structure
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.362584
Reference27 articles.
1. Structure and stability of sputter deposited beta‐tungsten thin films
2. Tungsten Films with the A15 Structure
3. Growth of fine crystals with A-15 type structure in vacuum-deposited tungsten films studied by high-resolution electron microscopy
4. X‐ray diffraction analysis and x‐ray photoelectron spectroscopy of α‐ and β‐W thin films grown by ion beam assisted deposition
5. Stable low-stress tungsten absorber technology for sub-half-micron x-ray lithography
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