Structure and stability of sputter deposited beta‐tungsten thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111318
Reference15 articles.
1. SUPERCONDUCTIVITY IN EVAPORATED TUNGSTEN FILMS
2. SUPERCONDUCTIVITY IN EVAPORATED TUNGSTEN FILMS
3. SUPERCONDUCTIVITY IN EVAPORATED TUNGSTEN FILMS
4. Superconductivity in β‐Tungsten Films
5. A comparison of tungsten film deposition techniques for very large scale integration technology
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