Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications
Author:
Publisher
AIP Publishing
Subject
General Engineering,General Materials Science
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/aplmater/2/10/1.4897959.pdf?itemId=/content/aip/journal/aplmater/2/10/10.1063/1.4897959&mimeType=pdf&containerItemId=content/aip/journal/aplmater
Reference17 articles.
1. High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges
2. Chemical Vapor Deposition of α-Boron Layers on Silicon for Controlled Nanometer-Deep p + n Junction Formation
3. Microstructural, tribological and electrochemical corrosion studies on reactive DC magnetron sputtered zirconium nitride films with Zr interlayer on steel
4. Optimization of the deposition process of ZrN and TiN thin films on Si(1 0 0) using design of experiment method
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