High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges-Reference-Cited by-同舟云学术

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High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

Published:2011-09-08 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Shi L.,Nihtianov S.,Scholze F.,Gottwald A.,Nanver L. K.

Publisher

SPIE

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low gain avalanche diodes for photon science applications;Frontiers in Physics;2024-07-24

2. Graphene Quantum Dots Enhanced Graphene/Si Deep Ultraviolet Avalanche Photodetectors;IEEE Electron Device Letters;2024-05

3. 4K Detectors Array for On-Wafer EUV Imaging in Lithography Control Beyond 5-nm Node;IEEE Transactions on Electron Devices;2023-11

4. Boron-Implanted Black Silicon Photodiode with Close-to-Ideal Responsivity from 200 to 1000 nm;ACS Photonics;2023-05-22

5. Ultraviolet Photodetectors: From Photocathodes to Low-Dimensional Solids;Sensors;2023-05-02

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