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Extreme ultraviolet radiation emitted by helium microwave driven plasmas

Published:2016-06-28 Issue:24 Volume:119 Page:243305
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Espinho S.¹,Felizardo E.¹,Tatarova E.¹^ORCID,Alves L. L.¹^ORCID

Affiliation:

1. Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, 1049-001 Lisboa, Portugal

Funder

FundaÃƒÂ{section sign}ÃƒÂ£o para a ciÃƒÂªncia e a Tecnologia, Portugal

FundaÃƒÂ{section sign}ÃƒÂ£o para a SciÃƒÂªncia e a Tecnologia, Portugal

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4954850

Reference28 articles.

1. INTRODUCTION

2. Extreme ultraviolet induced defects on few-layer graphene

3. Large Area Extreme-UV Lithography of Graphene Oxide via Spatially Resolved Photoreduction

4. Comparison of H2and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

5. Scalability limits of Talbot lithography with plasma-based extreme ultraviolet sources

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Spectroscopic study of low-pressure microwave-induced helium discharge in the extreme ultraviolet wavelength range;Journal of Applied Physics;2023-03-17

2. Cold plasma for the disinfection of industrial food‐contact surfaces: An overview of current status and opportunities;Comprehensive Reviews in Food Science and Food Safety;2022-01-24

3. Magnetic field-enhanced beam monitor for ionizing radiation;Review of Scientific Instruments;2020-06-01

4. Temporally resolved diagnosis of an atmospheric-pressure pulse-modulated argon surface wave plasma by optical emission spectroscopy;Journal of Physics D: Applied Physics;2017-12-13

5. Vacuum ultraviolet radiation emitted by microwave driven argon plasmas;Journal of Applied Physics;2017-04-21

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