Formation and stability of crystalline and amorphous Al2O3 layers deposited on Ga2O3 nanowires by atomic layer epitaxy
Author:
Affiliation:
1. Electronics Science and Technology Division, Naval Research Laboratory, Washington DC 20375, USA
Funder
Office of Naval Research (ONR)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4963282
Reference24 articles.
1. Growth of crystalline Al2O3 via thermal atomic layer deposition: Nanomaterial phase stabilization
2. Enhanced Lithiation Cycle Stability of ALD-Coated Confined a-Si Microstructures Determined Using In Situ AFM
3. Enhanced plasmon coupling in crossed dielectric/metal nanowire composite geometries and applications to surface-enhanced Raman spectroscopy
4. Experimental study of ELNES at grain boundaries in alumina: intergranular radiation damage effects on Al-L23 and O-K edges
5. Surface Energies and Thermodynamic Phase Stability in Nanocrystalline Aluminas
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effect of Al2O3 insertion layer on ferroelectricity in HfO2/ZrO2 nanolaminates;T NONFERR METAL SOC;2023
2. Effect of Al2O3 insertion layer on ferroelectricity in HfO2/ZrO2 nanolaminates;Transactions of Nonferrous Metals Society of China;2023-10
3. Atomic layer deposition of α-Al2O3 from trimethylaluminum and H2O: Effect of process parameters and plasma excitation on structure development;Journal of Crystal Growth;2023-05
4. Atomic-Layer-Deposited Aluminum Oxide Thin Films Probed with X-ray Scattering and Compared to Molecular Dynamics and Density Functional Theory Models;ACS Omega;2022-11-04
5. Mechanical properties of crystalline and amorphous aluminum oxide thin films grown by atomic layer deposition;Surface and Coatings Technology;2022-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3