Mechanical properties of crystalline and amorphous aluminum oxide thin films grown by atomic layer deposition-Reference-Cited by-同舟云学术

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Mechanical properties of crystalline and amorphous aluminum oxide thin films grown by atomic layer deposition

Published:2022-05 Issue: Volume:438 Page:128409
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Aarik Lauri,Mändar Hugo,Tarre Aivar,Piirsoo Helle-Mai,Aarik Jaan

Funder

European Regional Development Fund

European Commission

Eesti Teadusagentuur

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference54 articles.

1. Atomic layer deposition of high-k oxides of the group 4 metals for memory applications;Niinistö;Adv. Eng. Mater.,2009

2. Al2O3-based RRAM using atomic layer deposition (ALD) with 1-μA RESET current;Wu;IEEE Electron Device Lett.,2010

3. 3-D vertical via nitrogen-doped aluminum oxide resistive random access memory;Lien;IEEE Trans. Electron Devices,2021

4. Irregular resistive switching behaviours of Al2O3-based resistor with cu electrode;Ryu;Metals,2021

5. Investigation of multiple-mesa-nanochannel array GaN-based MOSHEMTs with Al2O3 gate dielectric layer;Jian;J. Solid State Sci. Technol.,2021

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1. Study of Mid-Pressure Ar Radiofrequency Plasma Used in Plasma-Enhanced Atomic Layer Deposition of α-Al2O3;Processes;2024-03-20

2. Surface Composites Synthesized through the Incorporation of Atomic Layer Deposited AlO_x into Nanoporous Fuzzy Tungsten;ACS Applied Materials & Interfaces;2024-03-11

3. On the Structure of Oxygen Deficient Amorphous Oxide Films;Advanced Science;2023-12-26

4. A review of the degradation mechanisms of NCM cathodes and corresponding mitigation strategies;Journal of Energy Storage;2023-12

5. Synthesis of Ultrafine Aluminum-Rich Corundum Nanocrystals;Crystal Growth & Design;2023-08-29

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