Atomic force microscopy deep trench and sidewall imaging with an optical fiber probe
Author:
Affiliation:
1. The State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, 2 Yikuang, 150080 Harbin, China
2. Robotics and Microsystems Center, Soochow University, 215021 Suzhou, China
Funder
The Fundamental Research Funds for the Central University
National Natural Science Foundation of China (NSFC)
Program for New Century Excellent Talents in University (New Century Excellent Talents Program)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4903466
Reference25 articles.
1. Metrology of subwavelength photoresist gratings using optical scatterometry
2. A new flexible scatterometer for critical dimension metrology
3. Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results
4. A metrological electron microscope system for microfeatures of very large scale integrated circuits
5. TEM-Based Metrology for HfO2Layers and Nanotubes Formed in Anodic Aluminum Oxide Nanopore Structures
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