A new flexible scatterometer for critical dimension metrology
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3280160
Reference16 articles.
1. System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm
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3. Fast nondestructive optical measurements of critical dimension uniformity and linearity on AEI and ASI phase-shift masks
4. Mathematical modelling of indirect measurements in scatterometry
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