Mathematical modelling of indirect measurements in scatterometry-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Mathematical modelling of indirect measurements in scatterometry

Published:2006-11 Issue:9 Volume:39 Page:782-794
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Gross H.,Model R.,Bär M.,Wurm M.,Bodermann B.,Rathsfeld A.

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference28 articles.

1. Ellipsometric scatterometry for metrology of sub-0.1μm-linewidth structures;Minhas;Appl. Opt.,1998

2. Erratum to “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring” [Thin Solid Films 455–456, 2004, 828–836];Huang;Thin Solid Films,2004

3. Metrology of subwavelength photoresist gratings using optical scatterometry;Raymond;J. Vac. Sci. Technol.,1995

4. Multiparameter grating metrology using optical scatterometry;Raymond;J. Vac. Sci. Technol.,1997

5. Optical scatterometry of subwavelength diffraction gratings: neural-network approach;Kallioniemi;Appl. Opt.,1998

Cited by 82 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A model for indirect measurement;Measurement;2023-06

2. A Laplace sensitivity operator enhances the calculation efficiency of OCD metrology;Optics Express;2023-01-09

3. Determination of steep sidewall angle using polarization-sensitive asymmetric scattering;Measurement Science and Technology;2021-05-17

4. Fast scatterometric measurement of periodic surface structures in plasma-etching processes;Measurement;2021-01

5. 3D modeling of coherence scanning interferometry on 2D surfaces using FEM;Optics Express;2020-12-16

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3