3D modeling of coherence scanning interferometry on 2D surfaces using FEM
Author:
Funder
Deutsche Forschungsgemeinschaft
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference59 articles.
1. Fringe modulation skewing effect in white-light vertical scanning interferometry
2. Determination of fringe order in white-light interference microscopy
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5. Influences of edges and steep slopes in 3D interference and confocal microscopy
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