Room‐temperature oxidation of silicon catalyzed by Cu3Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103260
Reference10 articles.
1. Thermal oxidation of silicides on silicon
2. Thermal formation of SiO2 films over NiSi, NiSi2 and CoSi2 via silicide decomposition
3. Marker Experiments for the moving Species in Silicides During Solid Phase Epitaxy of Evaporated Si
4. Catalytic action of gold atoms on the oxidation of Si(111) surfaces
5. XPS, Auger study of Cu3Si and its reaction with oxygen
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