High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction-Reference-Cited by-同舟云学术

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High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction

Published:2017-05-29 Issue:22 Volume:110 Page:223109
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Cooper David¹,Bernier Nicolas¹,Rouvière Jean-Luc²,Wang Yun-Yu³,Weng Weihao³,Madan Anita³,Mochizuki Shogo⁴,Jagannathan Hemanth⁴

Affiliation:

1. University Grenoble Alpes, F-38000 Grenoble, France and CEA, LETI, MINATEC Campus, F-38054 Grenoble, France

2. University Grenoble Alpes, F-38000 Grenoble, France and CEA, INAC, MINATEC Campus, F-38054 Grenoble, France

3. IBM Microelectronics, 2070 Route 52, Hopewell Junction, New York 12533, USA

4. IBM Research, 257 Fuller Road, Albany, New York 12203, USA

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4983124

Reference12 articles.

1. Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors

2. Quantitative measurement of displacement and strain fields from HREM micrographs

3. Strain characterization in SOI and strained-Si on SGOI MOSFET channel using nano-beam electron diffraction (NBD)

4. Nanoscale holographic interferometry for strain measurements in electronic devices

5. Strain measurement at the nanoscale: Comparison between convergent beam electron diffraction, nano-beam electron diffraction, high resolution imaging and dark field electron holography

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1. Atomic‐scale strain analysis for advanced Si/SiGe heterostructure by using transmission electron microscopy;Electron;2024-04-04

2. Mapping of the mechanical response in Si/SiGe nanosheet device geometries;Communications Engineering;2022-06-10

3. Micrometre-scale strain mapping of transistor arrays extracted from undersampled atomic-resolution images;Micron;2021-09

4. Scanning electron diffraction tomography of strain;Inverse Problems;2020-12-18

5. A Comparison of a Direct Electron Detector and a High-Speed Video Camera for a Scanning Precession Electron Diffraction Phase and Orientation Mapping;Microscopy and Microanalysis;2020-09-01

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