What is limiting low-temperature atomic layer deposition of Al2O3? A vibrational sum-frequency generation study
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4939654
Reference17 articles.
1. Low-Temperature Al2O3 Atomic Layer Deposition
2. Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
3. In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
4. Quartz Crystal Microbalance Studies of Al2O3 Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C
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