Low-Temperature Al2O3 Atomic Layer Deposition
Author:
Affiliation:
1. Department of Chemistry and Biochemistry and Department of Chemical Engineering, University of Colorado, Boulder, Colorado 80309-0215
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm0304546
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