Gigahertz-band electroacoustic devices based on AlN thick films sputtered on Al2O3 at low temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1631739
Reference5 articles.
1. Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates
2. Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices
3. GHz-Band Surface Acoustic Wave Devices Using Aluminum Nitride Thin Films Deposited by Electron Cyclotron Resonance Dual Ion-Beam Sputtering
4. Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films
5. Theory of interdigital couplers on nonpiezoelectric substrates
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