Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1509471
Reference10 articles.
1. High Frequency Surface Acoustic Wave Filter Using ZnO/Diamond/Si Structure
2. Study on Surface Acoustic Wave Characteristics of SiO2/Interdigital-Transducer/ZnO/Diamond Structure and Fabrication of 2.5 GHz Narrow Band Filter
3. Sound velocity of AlxGa1−xN thin films obtained by surface acoustic-wave measurements
4. Optical Guided Modes and Surface Acoustic Waves in GaN Grown on (0001) Sapphire Substrates
5. Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices
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