Thermal conductivity and mechanical properties of AlN-based thin films-Reference-Cited by-同舟云学术

Thermal conductivity and mechanical properties of AlN-based thin films

Published:2016-06-14 Issue:22 Volume:119 Page:225304
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Moraes V.¹^ORCID,Riedl H.¹^ORCID,Rachbauer R.²^ORCID,Kolozsvári S.³^ORCID,Ikeda M.⁴,Prochaska L.⁴,Paschen S.⁴,Mayrhofer P. H.¹⁵^ORCID

Affiliation:

1. Christian Doppler Laboratory for Application Oriented Coating Development at the Institute of Materials Science and Technology, TU Wien, A-1060 Wien, Austria

2. Oerlikon Balzers, Oerlikon Surface Solutions AG, LI-9496 Balzers, Liechtenstein

3. Plansee Composite Materials GmbH, D-86983 Lechbruck am See, Germany

4. Institute of Solid State Physics, TU Wien, A-1040 Wien, Austria

5. Institute of Materials Science and Technology, TU Wien, A-1060 Vienna, Austria

Funder

Deutsche Forschungsgemeinschaft (DFG)

Austrian Science Fund (FWF)

Christian Doppler Forschungsgesellschaft (CDG)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4953358

Reference50 articles.

1. The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films

2. GaN, AlN, and InN: A review

3. Microstructural design of hard coatings

4. High SAW velocity and high electromechanical coupling coefficient with the new three layered structure: ZnO/AlN/diamond

5. RF Bulk Acoustic Wave Resonators and Filters

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