Temporal behavior of the electron and negative ion densities in a pulsed radio‐frequency CF4 plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.349318
Reference20 articles.
1. Negative Ion Kinetics in RF Glow Discharges
2. Enhancement of the negative ion flux to surfaces from radio‐frequency processing discharges
3. Detection Technique of Negative Ions by Photodetachment in SF6Low-Frequency Discharge
4. Photodetachment effect in a radio frequency plasma in CF4
5. Negative ions in a radio-frequency plasma in CF4
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