Evidence of annealing effects on a high-density Si/SiO2 interfacial layer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119090
Reference19 articles.
1. Microscopic structure of theSiO2/Si interface
2. Si→SiO2transformation: Interfacial structure and mechanism
3. Growth of epitaxial silica on vicinal Si(001) surfaces during thermal oxidation in O2
4. X‐ray reflectivity studies of SiO2/Si(001)
5. Oxidation of silicon
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