Optical second-harmonic generation in sputter-deposited AlN films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368908
Reference23 articles.
1. GaN, AlN, and InN: A review
2. Growth of epitaxial AlN(0001) on Si(111) by reactive magnetron sputter deposition
3. Colorless, transparent,c‐oriented aluminum nitride films grown at low temperature by a modified sputter gun
4. Magnetron sputtering deposited AIN waveguides: effect of the structure on optical properties
5. Single-phase aluminum nitride films by dc-magnetron sputtering
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2. Enhancement of second-order optical nonlinearities and nanoscale periodic domain patterning in ferroelectric boron-substituted aluminum nitride thin films;Optical Materials Express;2023-05-03
3. Strongly enhanced second-order optical nonlinearity in CMOS-compatible Al1−xScxN thin films;APL Materials;2021-10-01
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