Strongly enhanced second-order optical nonlinearity in CMOS-compatible Al1−xScxN thin films
Author:
Affiliation:
1. Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, Pennsylvania 19104, USA
2. Electrical and Systems Engineering Department, University of Pennsylvania, Philadelphia, Pennsylvania 19104, USA
Funder
National Science Foundation
Army Research Office
Office of Naval Research
National Defense Science and Engineering Graduate
Publisher
AIP Publishing
Subject
General Engineering,General Materials Science
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0061787
Reference43 articles.
1. Integrated Photonics: Fundamentals
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