Magnetron sputtering deposited AIN waveguides: effect of the structure on optical properties
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference8 articles.
1. Sputtering and chemical vapour deposition of piezoelectric ZnO, AlN and K3Li2Nb5O15 films for optical waveguides and surface acoustic wave devices
2. Low‐temperature coefficient bulk acoustic wave composite resonators
3. Voltage controlled, reactive planar magnetron sputtering of AlN thin films
4. R.F.-magnetron-sputtered AlN films for microwave acoustic resonators
5. Reactively sputtered AlN films for GaAs annealing caps
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1. Fabrication of Al/AlN nano-composite layers by friction stir processing of 6061 Al-T6 substrate;Surface and Interface Analysis;2014-11-18
2. Optical second-harmonic generation in sputter-deposited AlN films;Journal of Applied Physics;1998-12
3. Caractérisation structurale et contraintes résiduelles de films d'AIN par diffraction des rayons X;Le Journal de Physique IV;1998-10
4. Laser surface modification: structural and tribological studies of AlN coatings;Surface and Coatings Technology;1998-03
5. Aluminium nitride films prepared by reactive magnetron sputtering;Journal of Physics D: Applied Physics;1997-08-07
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