Author:
Shimizu Ryuichi,Everhart T. E.
Subject
Physics and Astronomy (miscellaneous)
Cited by
35 articles.
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1. Cross Sections of Scattering Processes in Electron-Beam Lithography;Russian Microelectronics;2023-04
2. Cross Sections of Scattering Processes in Electron-Beam Lithography;Микроэлектроника;2023-03-01
3. E-Beam Lithography Simulation Techniques;Russian Microelectronics;2020-03
4. A comparative study of inelastic scattering models at energy levels ranging from 0.5 keV to 10 keV;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-03
5. Simulation of electron beam lithography of nanostructures;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11