Funder
National Science Council of Taiwan
TSMC
Subject
Instrumentation,Nuclear and High Energy Physics
Reference75 articles.
1. CASINO V2.42 – A fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users;Drouin;Scanning,2007
2. A. Eades, Monte Carlo Modeling for Electron Microscopy and Microanalysis, by D.C. Joy., Oxford University Press, Wiley Subscription Services, Inc., New York, 1996.
3. Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library;Villarrubia;Ultramicroscopy,2015
4. Enhancement of spatial resolution in generating point spread functions by Monte Carlo simulation in electron-beam lithography;Lee;J. Vac. Sci. Technol., B,2011
5. Effects of fast secondary electrons to low-voltage electron beam lithography;Bolorizadeh;J. Micro-Nanolith. Mem.,2007