Subject
General Physics and Astronomy
Cited by
8 articles.
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1. Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2;Journal of Vacuum Science & Technology A;2023-07-18
2. Ions;Experimental Innovations in Surface Science;2015
3. Metallization;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22
4. Broad Ion Sources—Improved Stability with Oxygen;Experimental Innovations in Surface Science;1998
5. Mechanism of Reactive Ion Etching Lag for Aluminum Alloy Etching;Japanese Journal of Applied Physics;1995-04-30